JPH0541981B2 - - Google Patents

Info

Publication number
JPH0541981B2
JPH0541981B2 JP61190341A JP19034186A JPH0541981B2 JP H0541981 B2 JPH0541981 B2 JP H0541981B2 JP 61190341 A JP61190341 A JP 61190341A JP 19034186 A JP19034186 A JP 19034186A JP H0541981 B2 JPH0541981 B2 JP H0541981B2
Authority
JP
Japan
Prior art keywords
workpiece
alignment
exposure
section
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61190341A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6346466A (ja
Inventor
Tadao Komata
Naoshi Kozu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OKU SEISAKUSHO CO Ltd
Original Assignee
OKU SEISAKUSHO CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OKU SEISAKUSHO CO Ltd filed Critical OKU SEISAKUSHO CO Ltd
Priority to JP61190341A priority Critical patent/JPS6346466A/ja
Priority to US07/084,872 priority patent/US4764791A/en
Publication of JPS6346466A publication Critical patent/JPS6346466A/ja
Publication of JPH0541981B2 publication Critical patent/JPH0541981B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/18—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for positioning only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/043—Construction of the grippers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/04—Copying apparatus without a relative movement between the original and the light source during exposure, e.g. printing frame or printing box
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP61190341A 1986-08-13 1986-08-13 両面露光用ワ−クアライメント装置 Granted JPS6346466A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61190341A JPS6346466A (ja) 1986-08-13 1986-08-13 両面露光用ワ−クアライメント装置
US07/084,872 US4764791A (en) 1986-08-13 1987-08-13 Work alignment apparatus for double-sided exposure of a work

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61190341A JPS6346466A (ja) 1986-08-13 1986-08-13 両面露光用ワ−クアライメント装置

Publications (2)

Publication Number Publication Date
JPS6346466A JPS6346466A (ja) 1988-02-27
JPH0541981B2 true JPH0541981B2 (en]) 1993-06-25

Family

ID=16256583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61190341A Granted JPS6346466A (ja) 1986-08-13 1986-08-13 両面露光用ワ−クアライメント装置

Country Status (2)

Country Link
US (1) US4764791A (en])
JP (1) JPS6346466A (en])

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0766192B2 (ja) * 1988-05-30 1995-07-19 株式会社オーク製作所 自動露光装置におけるワーク位置決め方法
CH677082A5 (en]) * 1988-06-01 1991-04-15 Bobst Sa
US4936655A (en) * 1988-07-07 1990-06-26 Grumman Aerospace Corporation Alignment fixture for an optical instrument
US4993809A (en) * 1988-10-07 1991-02-19 Grumman Aerospace Corporation Mounting fixture for an optical instrument
DE3936723A1 (de) * 1989-11-04 1991-05-08 Loehr & Herrmann Gmbh Vorrichtung zum selbsttaetigen positionieren von leiterplatten
US5083156A (en) * 1990-03-16 1992-01-21 Dai Nippon Insatsu Kabushiki Kaisha Vacuum contact printing device and exposure apparatus and original contact device
US5253012A (en) * 1990-10-05 1993-10-12 Canon Kabushiki Kaisha Substrate holding apparatus for vertically holding a substrate in an exposure apparatus
DE4105284A1 (de) * 1991-02-20 1992-11-05 Bacher Gmbh B Verfahren und vorrichtung zur videounterstuetzten montage
JP2769753B2 (ja) * 1991-08-28 1998-06-25 株式会社オーク製作所 画像形成用露光装置
US5337151A (en) * 1992-07-28 1994-08-09 Optical Radiation Corporation Double-sided circuit board exposure machine and method with optical registration and material variation compensation
FR2703558B1 (fr) * 1993-03-31 1995-06-30 Automa Tech Sa Installation d'exposition à la lumière d'une plaque de circuit imprimé double face à travers les clichés.
FR2704660B1 (fr) * 1993-04-27 1995-07-13 Sgs Thomson Microelectronics Masques pour une machine d'insolation double face.
DE69505448T2 (de) * 1994-03-15 1999-04-22 Canon K.K., Tokio/Tokyo Maske und Maskenträger
US5627378A (en) * 1996-02-28 1997-05-06 Orc Electronic Products, A Divison Of Benson Eyecare Corporation Die set for automatic UV exposure system
JP3322167B2 (ja) * 1997-05-29 2002-09-09 ウシオ電機株式会社 マスク保持フレームの支持構造
US6215548B1 (en) 1999-03-11 2001-04-10 Olec Corporation Nested glass exposure tool registration device
US6356337B1 (en) * 2000-03-08 2002-03-12 Anvik Corporation Two-sided substrate imaging using single-approach projection optics
US6621553B2 (en) 2001-03-30 2003-09-16 Perkinelmer, Inc. Apparatus and method for exposing substrates
US7888664B2 (en) * 2008-03-10 2011-02-15 Eastman Kodak Company Plate pallet alignment system
EP3250390B1 (en) 2015-01-29 2020-03-04 Hewlett-Packard Development Company, L.P. Generating a day/night image
CN118732420B (zh) * 2024-08-30 2024-11-26 温州职业技术学院 一种曝光机的双面对位装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5080122A (en]) * 1973-11-14 1975-06-30
US4389115A (en) * 1981-08-06 1983-06-21 Richter Thomas A Optical system
JPS60168148A (ja) * 1984-02-13 1985-08-31 Oak Seisakusho:Kk 焼付機
US4614425A (en) * 1984-04-20 1986-09-30 Western Litho Plate & Supply Co. Photographic printing method and apparatus
JPS62212657A (ja) * 1986-03-14 1987-09-18 Oak Seisakusho:Kk 移送式の両面露光装置

Also Published As

Publication number Publication date
JPS6346466A (ja) 1988-02-27
US4764791A (en) 1988-08-16

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